Design of a Single Axis Rate Table to Measure Angular Motion of a Mems-Based Gyroscope

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DESIGN OF A SINGLE AXIS RATE TABLE TO MEASURE ANGULAR MOTION OF A MEMS-BASED GYROSCOPE Final Year Design Project Report Submitted by M. Usman Ehsan Saad Mirza Sarah Nusrat S. Nabeel Hassan Faculty of Electronic Engineering Ghulam Ishaq Khan Institute of Engineering Sciences and Technology. May 2009. Abstract The following report deals with the development of a rate table at GIKI for the purpose of testing MEMS-based gyroscopes being developed here. This report consists of the initial study done by the team in this field of science. Rate tables have been studied in detail and knowledge about commercially available rate tables has been included too. The report discusses the objective of the project and problem statement. It…show more content…
Thus, to be compatible with the accuracy of gyros and accelerometers currently in use, a rate table system must be capable of measuring and controlling angular velocities down to the order of 0.001 degree per second. Single-Axis test tables provide precise angular position, rate and acceleration for development and production testing of inertial components and systems. What is Gyroscope? Micro machined inertial sensors, consisting of accelerometers and gyroscopes are one of the most important types of silicon based sensors. A gyroscope is a device for measuring or maintaining orientation, based on the principles of angular momentum. The Gyroscope developed at GIKI is a thermally actuated 3-DoF micro-machined gyroscope utilizing Chevron thermal actuators to drive proof mass. There are a number of actuation mechanisms which include electrostatic, piezoelectric, thermal etc. The benefits of this design will be described later. These actuators are activated by Joule heating. When a potential difference is applied between two or more points on electrically conducting material it causes flow of electrical current which induces thermal strain due to internal heating. Consequently these thermal strains generate the desired mechanical deformation or force. These thermal actuators are capable of providing a large force. There are two types of thermal actuators: hot/cold

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