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Dust Negative Effects

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Dust particles are observed in a various plasma environments including space (e.g., in planetary rings and tails of comets), (-- removed HTML --) (-- removed HTML --) 1 (-- removed HTML --) (-- removed HTML --) earth's ionosphere, (-- removed HTML --) (-- removed HTML --) 2 (-- removed HTML --) (-- removed HTML --) as well as industrial and laboratory plasmas. In the latter case, dust formation is often an undesirable side-effect. For instance, dust particles can contaminate the synthesized thin films in plasma processing devices, (-- removed HTML --) (-- removed HTML --) 3 (-- removed HTML --) (-- removed HTML --) cause reduction of the image quality in EUV lithography machines, (-- removed HTML --) (-- removed HTML --) 4 (--…show more content…
(-- removed HTML --) (-- removed HTML --) In many of the abovementioned plasmas, typically the Debye length ( (-- removed HTML --) (-- removed HTML --) (-- removed HTML --) (-- removed HTML --) (-- removed HTML --) λ (-- removed HTML --) (-- removed HTML --) (-- removed HTML --) (-- removed HTML --) D (-- removed HTML --) (-- removed HTML --) (-- removed HTML --) (-- removed HTML --) (-- removed HTML --) ) is on the order of 1–0.01 mm, and is considerably larger than the particle radius ( (-- removed HTML --) a (-- removed HTML --) ) of up to a few micron. (-- removed HTML --) (-- removed HTML --) 16–19 (-- removed HTML --) (-- removed HTML --) This permits (at least for mono-energetic ions (-- removed HTML --) (-- removed HTML --) 20 (-- removed HTML --) (-- removed HTML --) ) the use of the orbit-motion-limited (OML) theory (-- removed HTML --) (-- removed HTML --) 21–23 (-- removed HTML --) (-- removed HTML --) and neglection of particle screening. (-- removed HTML --) (-- removed HTML --) 24 (-- removed HTML --) (-- removed HTML --) For some applications, however, this particle size limit no longer holds. For example, in magnetic fusion energy devices, (-- removed HTML --) (-- removed HTML --) 25 (-- removed HTML --) (-- removed HTML --) the local Debye length is relatively small (∼1 (-- removed HTML --) μ (-- removed HTML --) m) due to the high density
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