The Surface Stress on the Microcantilever

1445 Words Feb 4th, 2018 6 Pages
The surface stress associated with the deflection of micro cantilever is commonly calculated using Stoney’s formula, which is simply relates an induced substrate curvature to a surface stress. Piezoresistive microcantilever deflection process involves the embedded of a piezoresistive material such as doped polysilicon on the top surface of the microcantilever to measure the stress change, while the microcantilever beam deflects a stress…

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