VSI MOde Vision Software

965 WordsJan 29, 20184 Pages
The surface texture images for various samples recorded with the traceable 3D optical profiler in VSI mode with Vision software, are shown in figure 4-8. Figure 4: plain silicon wafer Figure 5: S4P5M (Plain wafer etched with 5M KOH/IPA solution for 15 minutes) Figure 6: S3P1M (Plain silicon wafer etched Figure 5: M (6-8µm) Wafer ground using Al2O3 with 1M KOH/IPA solution for 15 minutes) powder of grain size 6-8µm Figure 6: M (16µm) Wafer ground using Al2O3 powder of grain size 16µm Figure 7:S1ME1M (Wafer Ground using Al2O3 powder of Grain size 6-8µm (M6-8 µm) followed by Etching with 1M KOH/ IPA/ H2O for 15 minutes UV-VIS Spectrophotometer (UV-VIS 2410 PC) was used for reflectance studies of samples. Figure 10 shows reflection measurements of Si wafers before and after surface texturing. A representative value of surface roughness and percentage reflectance at 800nm is given in Table 2. Figure 10: Change in reflection after surface texturing Table 2: Results of surface roughness obtained from optical profiler and results of % reflectance Sample Sample name: details Average Surface roughness Ra (nm) Average Surface roughness Sa (nm) Surface roughness Rt % Reflectance At

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