1. Give a brief answer for each of the following. (a) How is the cleanroom classified? (b) What are the three levels for contaminant reduction in microfabrication. Briefly explain them. (c) Describe the entire silicon wafer cleaning procedure (including pre-cycle clean, SC-I, and SC-II cleaning. Briefly explain the main clean purpose in each cleaning step

1. Give a brief answer for each of the following. (a) How is the cleanroom classified? (b) What are the three levels for contaminant reduction in microfabrication. Briefly explain them. (c) Describe the entire silicon wafer cleaning procedure (including pre-cycle clean, SC-I, and SC-II cleaning. Briefly explain the main clean purpose in each cleaning step

Principles Of Radiographic Imaging: An Art And A Science

6th Edition

ISBN:9781337711067

Author:Richard R. Carlton, Arlene M. Adler, Vesna Balac

Publisher:Richard R. Carlton, Arlene M. Adler, Vesna Balac

Chapter11: Filtration

Section: Chapter Questions

Problem 8RQ

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