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PhysicsQ&A LibraryWhat is the smallest possible feature size that can be resolved by using a 193-nm optical source and the highest possible NA that can be obtained by a lens when exposing the image in air? Note that NA can be determined by the equationNA = n∙sin(θ)where n is the index of refraction of the medium in which the lens is working (air in this instance) and θ is the maximal half-angle of the cone of light that can enter or exit the lens and has a maximum possible value of 90˚ for a very large lens.Question

Asked Mar 2, 2020

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What is the smallest possible feature size that can be resolved by using a 193-nm optical source and the highest possible NA that can be obtained by a lens when exposing the image in air? Note that NA can be determined by the equation

NA = n∙sin(θ)

where n is the index of refraction of the medium in which the lens is working (air in this instance) and θ is the maximal half-angle of the cone of light that can enter or exit the lens and has a maximum possible value of 90˚ for a very large lens.

Step 1

The smallest possible feature size, that is the critical dimension (*CD*) can calculate by the following expression.

Step 2

Write the expression for the numerical aperture (*NA*) of the lens.

Step 3

Calculate the angle (*θ*) for the maximum numerical aperture (*NAmax*) as below,

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