What is the smallest possible feature size that can be resolved by using a 193-nm optical source and the highest possible NA that can be obtained by a lens when exposing the image in air? Note that NA can be determined by the equationNA = n∙sin(θ)where n is the index of refraction of the medium in which the lens is working (air in this instance) and θ is the maximal half-angle of the cone of light that can enter or exit the lens and has a maximum possible value of 90˚ for a very large lens.

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Asked Mar 2, 2020
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What is the smallest possible feature size that can be resolved by using a 193-nm optical source and the highest possible NA that can be obtained by a lens when exposing the image in air? Note that NA can be determined by the equation

NA = n∙sin(θ)

where n is the index of refraction of the medium in which the lens is working (air in this instance) and θ is the maximal half-angle of the cone of light that can enter or exit the lens and has a maximum possible value of 90˚ for a very large lens.

 
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Expert Answer

Step 1

The smallest possible feature size, that is the critical dimension (CD) can calculate by the following expression.

Physics homework question answer, step 1, image 1

Step 2

Write the expression for the numerical aperture (NA) of the lens.

Physics homework question answer, step 2, image 1

Step 3

Calculate the angle (θ) for the maximum numerical aperture (NAmax) as below,

Physics homework question answer, step 3, image 1

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