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In the thermal processing of semiconductor materials, annealing is accomplished by heating a silicon wafer according to a temperature-time recipe and then maintaining a fixed elevated temperature for a prescribed period of time. For the process tool arrangement shown as follows, the wafer is in an evacuated chamber whose walls are maintained at
To avoid warping the wafer and inducing slip planes in the crystal structure, the temperature difference across the thickness of the wafer must be less than
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Introduction to Heat Transfer
- 2.3 The shield of a nuclear reactor is idealized by a large 25-cm-thick flat plate having a thermal conductivity of . Radiation from the interior of the reactor penetrates the shield and there produces heat generation that decreases exponentially from a value of at the inner surface to a value of at a distance of 12.5 cm from the interior surface. If the exterior surface is kept at 38°C by forced convection, determine the temperature at the inner surface of the field. Hint: First set up the differential equation for a system in which the heat generation rate varies according to .arrow_forward1.4 To measure thermal conductivity, two similar 1-cm-thick specimens are placed in the apparatus shown in the accompanying sketch. Electric current is supplied to the guard heater, and a wattmeter shows that the power dissipation is 10 W. Thermocouples attached to the warmer and to the cooler surfaces show temperatures of 322 and 300 K, respectively. Calculate the thermal conductivity of the material at the mean temperature in W/m K. Problem 1.4arrow_forwardBoth ends of a 0.6-cm copper U-shaped rod are rigidly affixed to a vertical wall as shown in the accompanying sketch. The temperature of the wall is maintained at 93C. The developed length of the rod is 0.6 m, and it is exposed to air at 38C. The combined radiation and convection heat transfer coefficient for this system is 34W/m2K. (a) Calculate the temperature of the midpoint of the rod. (b) What will the rate of heat transfer from the rod be?arrow_forward
- 5.43 A refrigeration truck is traveling at 130 km/h on a desert highway where the air temperature is . The body of the truck is idealized as a rectangular box 3 m wide, 2.1 m high, and 6 m long, at a surface temperature . Assume that (1) the heat transfer from the front and back of the truck is neglected, (2) the stream does not separate from the surface, and (3) the boundary layer is turbulent over the whole surface. Calculate the required cooling rate of the refrigeration unit.arrow_forwardRepeat Problem 1.35 but assume that instead of surface temperatures, the given temperatures are those of the air on the left and right sides of the wall and that the convection heat transfer coefficients on the left and right surfaces are 6 and 10W/m2K, respectively.arrow_forward
- Principles of Heat Transfer (Activate Learning wi...Mechanical EngineeringISBN:9781305387102Author:Kreith, Frank; Manglik, Raj M.Publisher:Cengage Learning