After a pre-deposition diffusion into a water with a background concentration of 1016 /cm3, a following drive-in step at 1100C yields a final junction depth of 2um. Estimate the required time, if the surface concentration after drive-in decreases to 3 X 1017/cm3. Do= 0.32 cm2/s andEA= 3.56 eV. 2. After a pre-deposition diffusion into a wafer with a backgroundconcentration of 1016/cm3, a following drive-in step at 1100°C yields a finaljunction depth of 2 um. Estimate the required time, if the surfaceconcentration after drive-in decreases to 3 X 1017/cm3. Do = 0.32 cm2/sand EA = 3.56 eV

Concept used: Diffusion coefficient depends on temperature.

After a pre-deposition diffusion into a water with a background concentration of 1016 /cm3, a following drive-in step at 1100C yields a final junction depth of 2um. Estimate the required time, if the surface concentration after drive-in decreases to 3 X 1017/cm3. Do= 0.32 cm2/s andEA= 3.56 eV

After a pre-deposition diffusion into a water with a background concentration of 1016 /cm3, a following drive-in step at 1100C yields a final junction depth of 2um. Estimate the required time, if the surface concentration after drive-in decreases to 3 X 1017/cm3. Do= 0.32 cm2/s andEA= 3.56 eV

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Question

After a pre-deposition diffusion into a water with a background concentration of 10¹⁶/cm³, a following drive-in step at 1100C yields a final junction depth of 2um. Estimate the required time, if the surface concentration after drive-in decreases to 3 X 10¹⁷/cm³. D_o₌ 0.32 cm²/s andE_A= 3.56 eV.