Exp. 2/DC sputtering: 1- Explain the main principles of coating by DC-sputtering technique with schematic? 2- Give the main steps to operate the DC-sputtering device? 3- What are the main parameters that effect on coating process by DC- sputtering?

Delmar's Standard Textbook Of Electricity
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ISBN:9781337900348
Author:Stephen L. Herman
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Exp. 2/DC sputtering:
1- Explain the main principles of coating by DC-sputtering technique with
schematic?
2- Give the main steps to operate the DC-sputtering device?
3- What are the main parameters that effect on coating process by DC-
sputtering?
4- Compare between DC-sputtering and RF-sputtering?
5- What are the main components of DC-sputtering device with schematic?
Transcribed Image Text:Exp. 2/DC sputtering: 1- Explain the main principles of coating by DC-sputtering technique with schematic? 2- Give the main steps to operate the DC-sputtering device? 3- What are the main parameters that effect on coating process by DC- sputtering? 4- Compare between DC-sputtering and RF-sputtering? 5- What are the main components of DC-sputtering device with schematic?
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