charge, Qax are cleaning steps and the test location on the wafer where the charge was measured. The results summarized in Table 5. Table 5 Test Location Oxide Charge, Qox Cleaning Method Right (R) Left (L) (x 10" q/cm?) L 1.66 R 1.62 1.90 Complete Spin-Rinse-Dry R 1.84 1.92

charge, Qax are cleaning steps and the test location on the wafer where the charge was measured. The results summarized in Table 5. Table 5 Test Location Oxide Charge, Qox Cleaning Method Right (R) Left (L) (x 10" q/cm?) L 1.66 R 1.62 1.90 Complete Spin-Rinse-Dry R 1.84 1.92

Glencoe Algebra 1, Student Edition, 9780079039897, 0079039898, 2018

18th Edition

ISBN:9780079039897

Author:Carter

Publisher:Carter

Chapter10: Statistics

Section10.6: Summarizing Categorical Data

Problem 31PPS

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Concept explainers

Optimization

Optimization comes from the same root as "optimal". "Optimal" means the highest. When you do the optimization process, that is when you are "making it best" to maximize everything and to achieve optimal results, a set of parameters is the base for the selection of the best element for a given system.

Integration

Integration means to sum the things. In mathematics, it is the branch of Calculus which is used to find the area under the curve. The operation subtraction is the inverse of addition, division is the inverse of multiplication. In the same way, integration and differentiation are inverse operators. Differential equations give a relation between a function and its derivative.

Application of Integration

In mathematics, the process of integration is used to compute complex area related problems. With the application of integration, solving area related problems, whether they are a curve, or a curve between lines, can be done easily.

Volume

In mathematics, we describe the term volume as a quantity that can express the total space that an object occupies at any point in time. Usually, volumes can only be calculated for 3-dimensional objects. By 3-dimensional or 3D objects, we mean objects that have length, breadth, and height (or depth).

Area

Area refers to the amount of space a figure encloses and the number of square units that cover a shape. It is two-dimensional and is measured in square units.

Question

In an experiment to investigate oxide charge, Qax on a silicon wafer. The factors thought to induce oxide
charge, Qax are cleaning steps and the test location on the wafer where the charge was measured. The
results summarized in Table 5.
Table 5
Test Location
Oxide Charge, Qox
Cleaning Method
Right (R)
Left (L)
(x 10" q/cm?)
1.66
R
1.62
1.90
Complete
Spin-Rinse-Dry
1.84
1.92
R
1.84
L.
-4.21
R
-7.58
-1.35
By pass Rinse
Cycle
R
-2.20
-2.08
R
-5.36
Evaluate the significance of each factor using t-test. Show formulas and calculation steps of the
statistical analysis method.

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