Explain why the deposition temperature for polysilicon films is moderately low, usually between 600°-650°C

Delmar's Standard Textbook Of Electricity
7th Edition
ISBN:9781337900348
Author:Stephen L. Herman
Publisher:Stephen L. Herman
Chapter1: Atomic Structure
Section: Chapter Questions
Problem 6RQ: How many valence electrons are generally contained in materials used for insulators?
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Explain why the deposition temperature for polysilicon films is moderately low, usually
between 600°-650°C
Transcribed Image Text:Explain why the deposition temperature for polysilicon films is moderately low, usually between 600°-650°C
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