4) True/false / fill-in-the blank / short answers a) The typical precursors for silicon VPE growth are: b) Is Ni or Pa faster diffuser in Si? Why? c) A high phosphorus concentration in a silicon wafer will increase the oxidation rate during the growth of a thick oxide. T/ F

Introductory Circuit Analysis (13th Edition)
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Author:Robert L. Boylestad
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4) True/false / fill-in-the blank / short answers
a)
The typical precursors for silicon VPE growth are:
b)
Is Ni or P a faster diffuser in Si? Why?
c)
A high phosphorus concentration in a silicon wafer will increase the oxidation
rate during the growth of a thick oxide.
T / F
d)
Mass separation is achieved in ion implantation by electrostatics.
T / F
e)
PAC stands for:
The ratio of the oxidation linear reaction rate constants B/A (111) to B/A (100) is
f)
related to:
g)
I-line refers to:
Transcribed Image Text:4) True/false / fill-in-the blank / short answers a) The typical precursors for silicon VPE growth are: b) Is Ni or P a faster diffuser in Si? Why? c) A high phosphorus concentration in a silicon wafer will increase the oxidation rate during the growth of a thick oxide. T / F d) Mass separation is achieved in ion implantation by electrostatics. T / F e) PAC stands for: The ratio of the oxidation linear reaction rate constants B/A (111) to B/A (100) is f) related to: g) I-line refers to:
Temperature (°c)
1300
1400
10
1200
1100
1000
900
10-10
Ga
AI
In
10-13
В, Р
Sb
As
10-14
0.6
0.65
0.7
0.75
0.8
Temperature 1000/T ( K)
d.85
Diffusion coefficient (cm?/s)
Transcribed Image Text:Temperature (°c) 1300 1400 10 1200 1100 1000 900 10-10 Ga AI In 10-13 В, Р Sb As 10-14 0.6 0.65 0.7 0.75 0.8 Temperature 1000/T ( K) d.85 Diffusion coefficient (cm?/s)
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