TITLE:
SU-8 Photoresist Patterning on a 3” Glass Wafer (Ti coated) to fabricate microstructure test pattern.
ABSTRACT:
INTRODUCTION:
MATERIALS AND METHODS:
Materials Required:
Equipment and tools:
Spin Coater, Hotplates, Cleanroom Wipes, UV Light Source (Karl Suss Mask Aligner), Mask, Tweezers, and Glass Petri Dish.
Chemicals:
SU-8 Photoresist, SU-8 Developer (1-Methoxy-2-propanol acetate) and Isopropanol (IPA).
Controls:
The development procedures should be conducted in the wet bench hood and the chemicals used should be disposed of as advised.
Personal Protective Equipment:
Cleanroom suit, nitrile gloves and safety eye protection required for all procedures.
Substrate Pre- Treatment (Cleaning) SU-8
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Consequently, areas of the SU-8 film can polymerize at different rates. This short tutorial aims at providing some insights on the equipment and protocols that must be followed in order to coat SU-8 uniformly throughout the wafer surface.
The spin coating process is carried out with a spin coater (see Figure 2a). Figure 2b illustrates the principle of spin coating process. The substrate to be coated is positioned on a chuck which can be rotated at high speed (e.g., 2000-8000 rpm). A vacuum line is used in order to firmly maintain the wafer in place. SU-8 is gently deposited on the center of the wafer in order to cover around 2/3 of the wafer surface. When the wafer is accelerated, centrifugal forces will cause the photoresist to spread up to the edge of the wafer; leaving a thin film on its surface.
Soft Baking / Pre- Baking
The third step involved was Pre-Baking. Since the SU-8 film was still in liquid form after the spin coating, so it had to be cured before exposing. Pre-Baking evaporated the solvent and made the SU-8 film denser. It had to be done on a hot plate. Pre-Baking involved two stages where two hot plates were used.
The first hot plate was set at a temperature of 65°C and the second one was set at 95°C. Consulting the datasheet provided by the manufacturer, the film was placed on the first hot plate for 120
items presently in solid form in the lab kit or purchased separately for this laboratory
5. Heat treatment was used to denature the sucrase that was added to the control test tube. In the experimental test tube, alkaline
Kitson usually begins by creating slip cast moulds to create multiples of shapes, using various porcelains and clays. However Kitson favours Southern Ice porcelain due to its aesthetic properties such as its white colour and translucency which often she leaves in its natural raw state. Kitson then proceeds to paint, glaze and fire her ceramic pieces in communal kilns in Jingdezhen, China. This is important for her creative process as it helps to connect her pieces to their historical origin and also allows her to fire as much as possible due to the enormity of the kilns. Kitson then uses the coating method of physical vapour disposition. This method was created by NASA in 2010. Kitson prefers this new and highly technologically advanced practice because it prevents the erosion of the clays and porcelain, and can use both organic and inorganic coatings and is more environmentally friendly than most coating techniques. Once this is complete, the ceramic pieces are brought back to Australia to be assembled into her installations. She also attaches material like horse hair and silk at this stage. Kitson also hunts around the Hill End and Broken Hill areas collecting animal remains including skulls and bones. Once collected she then dips them in porcelain and allows for the porcelain to dry. These are then also added to her installation
Again, after ten seconds, the slide was rinsed with distilled water to wash off the decolorizer. The slide was placed back on the staining rack. Approximately ten drops of safranin were covered on the slide allowing resting for one minute. After one minute, the slide was rinsed one final time on the small sink followed by blotting the stained slide with Bibulous paper. The slide was placed between pages of Bibulous paper to help
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