Vng exer Cise.In "Orthogonal Design for Process Optimization and Its Application to Plasma Etching" (Solid State Technology, May 1987), G. Z. Yin andD. W. Jillie describe an experiment to determine the effect of CF, flow rate on the uniformity of the etch on a silicon wafer used inintegrated circuit manufacturing. Three flow rates are used in the experiment, and the resulting uniformity (in percent) for sixreplicates is shown below.ObservationsCF Flow(SCCM)12341252.5 4.4 2.6 3.2 3.2 4.01604.84.4 4.8 4.2 3.6 4.22004.6 3.3 2.8 3.4 4.2 5.3(a) Does C,F flow rate affect etch uniformity? Construct box plots to compare the factor levels and perform the analysis of variance.Use a = 0.05.There isthat flow rate affects etch uniformity.(b) Do the evidencee any problems with the underlying assumptions?no evidence In "Orthogonal Design for Process Optimization and Its Application to Plasma Etching" (Solid State Technology, May 1987), G. Z. Yin andD. W. Jillie describe an experiment to determine the effect of C2Fe flow rate on the uniformity of the etch on a silicon wafer used inintegrated circuit manufacturing. Three flow rates are used in the experiment, and the resulting uniformity (in percent) for sixreplicates is shown below.ObservationsC„F. Flow(SCCM)23451252.5 4.4 2.6 3.2 3.2 4.01604.8 4.4 4.8 4.2 3.6 4.22004.6 3.3 2.8 3.4 4.2 5.3(a) Does C,F, flow rate affect etch uniformity? Construct box plots to compare the factor levels and perform the analysis of variance.Use a = 0.05.There isthat flow rate affects etch uniformity.(b) Do the residuals indicate any problems with the underlying assumptions?No.Statistical Tables and ChartsYes.

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MATLAB: An Introduction with Applications

6th Edition

ISBN:9781119256830

Author:Amos Gilat

Publisher:Amos Gilat

Chapter1: Starting With Matlab

Section: Chapter Questions

Problem 1P

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Determine a formal solution of the heat flow problem described by the following initial-value and boundary problem
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