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Phosphine, PH3, is a gas widely used in the semiconductor industries as a dopant and a precursor for the deposition of compound semiconductors. For safety considerations, the permissible limits of phosphine must not exceed of the LC50 value expressed in terms of ppm. 30 When expressing the concentration of a small quantity of gas, parts per million (ppm) can be used. The unit 'ppm' is usually used for volume of gases and is expressed as shown in the equation below: The concentration of gas (in ppm) = volume of gas x 10 volume of air Given that the LC50 for phosphine is 55 mg m-at standard temperature and pressure, convert the LCso to ppm and determine its toxicity rating. (1)

Phosphine, PH3, is a gas widely used in the semiconductor industries as a dopant and a precursor for the deposition of compound semiconductors. For safety considerations, the permissible limits of phosphine must not exceed of the LC50 value expressed in terms of ppm. 30 When expressing the concentration of a small quantity of gas, parts per million (ppm) can be used. The unit 'ppm' is usually used for volume of gases and is expressed as shown in the equation below: The concentration of gas (in ppm) = volume of gas x 10 volume of air Given that the LC50 for phosphine is 55 mg m-at standard temperature and pressure, convert the LCso to ppm and determine its toxicity rating. (1)

Chemistry
Chemistry
10th Edition
ISBN:9781305957404
Author:Steven S. Zumdahl, Susan A. Zumdahl, Donald J. DeCoste
Publisher:Steven S. Zumdahl, Susan A. Zumdahl, Donald J. DeCoste
Chapter1: Chemical Foundations
Section: Chapter Questions
Problem 1RQ: Define and explain the differences between the following terms. a. law and theory b. theory and...
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Phosphine, PH3, is a gas widely used in the semiconductor industries as a dopant and a precursor for the deposition of compound semiconductors. For safety considerations, the permissible limits of phosphine must not exceed of the LC50 value expressed in terms of ppm. 30 When expressing the concentration of a small quantity of gas, parts per million (ppm) can be used. The unit 'ppm' is usually used for volume of gases and is expressed as shown in the equation below: The concentration of gas (in ppm) = volume of gas x 10 volume of air Given that the LC50 for phosphine is 55 mg m-at standard temperature and pressure, convert the LCso to ppm and determine its toxicity rating. (1)
Transcribed Image Text:Phosphine, PH3, is a gas widely used in the semiconductor industries as a dopant and a precursor for the deposition of compound semiconductors. For safety considerations, the permissible limits of phosphine must not exceed of the LC50 value expressed in terms of ppm. 30 When expressing the concentration of a small quantity of gas, parts per million (ppm) can be used. The unit 'ppm' is usually used for volume of gases and is expressed as shown in the equation below: The concentration of gas (in ppm) = volume of gas x 10 volume of air Given that the LC50 for phosphine is 55 mg m-at standard temperature and pressure, convert the LCso to ppm and determine its toxicity rating. (1)
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