subject : physical chemistry Q: Explain how wavelength of light used in Photolithography and optical instrument affect formation of micro pattern.

Physical Chemistry
2nd Edition
ISBN:9781133958437
Author:Ball, David W. (david Warren), BAER, Tomas
Publisher:Ball, David W. (david Warren), BAER, Tomas
Chapter15: Introduction To Electronic Spectroscopy And Structure
Section: Chapter Questions
Problem 15.61E
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subject : physical chemistry
Q: Explain how wavelength of light used in
Photolithography and optical instrument affect
formation of micro pattern.
Transcribed Image Text:subject : physical chemistry Q: Explain how wavelength of light used in Photolithography and optical instrument affect formation of micro pattern.
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