EBK MANUFACTURING ENGINEERING & TECHNOL
EBK MANUFACTURING ENGINEERING & TECHNOL
7th Edition
ISBN: 8220100793431
Author: KALPAKJIAN
Publisher: PEARSON
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Chapter 28, Problem 34QTP

If a square mask of side length 100 μm is placed on a {100} plane and oriented with a side in the 100 direction, how long will it take to etch a hole 5 μm deep at 80°C using ethylene-diamine/pyrocatechol? Sketch the resulting profile.

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Answer each of the following questions in one to three sentences. (a) What is lithography field? (b) What is misalignment in lithography? (e) What is selectivity in an etching process? (d) What is end-point detection in an etching process?  
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Stereolithography is a additive manufacturing process. based foil O powder filament liquid

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EBK MANUFACTURING ENGINEERING & TECHNOL

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