Concept explainers
Silicon nitride, Si3N4, is a material that is used in computer chips as an insulator. Silicon nitride can be prepared according to the chemical equation
If you wanted to prepare a surface film of Si3N4(s) that had an area of 9.0 mm2 and was 4.0 × 105 mm thick, what volume of SiH4 gas would you need to use at 1.0 × 105 torr and 775 K? The density of Si3N2 is 3.29 g/cm3.
Interpretation:
The volume of
Concept Introduction:
Ideal Gas Law:
The ideal gas equation is:
Where,
P is the pressure
V is the volume
T is the temperature
R is molar gas constant
n is the mole
Answer to Problem 5.147QP
The volume of
Explanation of Solution
Given data:
In computer chips, Silicon nitride,
It can be prepared as per the following chemical equation.
The density of
Calculation of volume of
The volume of film to be deposited is obtained by the product of its area and thickness.
Using the density of
Convert this mass to moles, then convert the moles of
Using ideal gas law, the volume of
Therefore, the volume of
The volume of
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